Compliant wafer prober docking adapter

摘要

A compliant wafer prober docking adapter provide compliant docking capability which permits a test head to be floated (to come down) to the top portion of the compliant adapter. The compliant adapter includes a compliant spring mechanism in the form of coiled springs which support a portion of the weight of the test head and wherein the upper portion of the adapter automatically aligns itself with the test head. This desirable aspect allows for all of the connectors to be seated properly, such that the locking of a cam locking mechanism provides a compliant and secure mating between the two surfaces. Also, a test head can be easily moved from one wafer prober to another, because the alignment of the adapter to the wafer is not being disturbed. Hence, the head can be moved between stations very quickly without having to go through another long and complex re-alignment process