| 摘要 |
PROBLEM TO BE SOLVED: To obtain a polishing apparatus in which replacement time of a beltlike polishing film is shortened, by a method wherein the beltlike polishing film whose polishing capability is lowered after a polishing operation is collected from a contact part with a face, to be polished, on an object to be polished, a beltlike polishing film feed means feeds a beltlike polishing film whose polishing capability is high for a next polishing operation. SOLUTION: When a polishing operation is finished, a polishing head 4 is moved upward by an up-and-down drive means 13, and a polishing film 8 which is installed at the polishing head 4 is separated together from an object 1 to be polished. The object 1 to be polished is removed from a polished object holding means 3 by a polished object conveyance means. By a polishing-film collection means 10, the polishing film 8 in a part in which its polishing capability used to polish the polished object 1 is lowered is removed from the underside of the polishing head 4 so as to be collected. At the same time, by a polishing- film feed means 9, a part, which is not used for a polishing operation, adjacent to a part which is used for the polishing operation out of the polishing film 8 is fed to the underside of the polishing head, and a new object 1 is polished again. |
