PRODUCTION OF NITRIDED MICROPARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a method for the formation of nitride microparticles without forming silicides on the surface of silicon, and to provide a method for the formation of nitride microparticles at any sites on the surface of silicon. SOLUTION: Nitride microparticles are formed by irradiating dangling bonds left on the molecularly terminated surface of, or artificially made dangling bonds on the surface of silicon with the vapor of excited nitrogen and that of an excited element other than nitrogen simultaneously or alternately to initiate the growth of the nitride microparticles from the dangling bond sites on the silicon surface.