发明名称 WIRE-BONDING METHOD AND DEVICE
摘要 PROBLEM TO BE SOLVED: To fix the amount of rise of a tool from a reference bond position by setting the height position of the tool when bonding a first wire to a reference bond position, and by moving the tool according to a travel amount being stored at a storage part in advance by using the reference bond position as a reference when looping a remaining wire. SOLUTION: A tool 10 is lowered, a sinking height position S1 when a first wire is bonded to a bond point P1 is detected by a bond position detection sensor, the sinking height position S1 is read as a reference bond position S1 and is stored at a storage part. Then, after the bonding to the bond point P1 is completed, the reference bond position S1 is used as a reference, a rising position C1 and a rising amount ΔH1 are calculated at a height position operation processing part based on a looping parameter being stored at the storage part in advance, the rising position C1 is positioned according to the calculation, and the tool 10 is moved to a second bond point.
申请公布号 JPH11191568(A) 申请公布日期 1999.07.13
申请号 JP19970367440 申请日期 1997.12.25
申请人 SHINKAWA LTD 发明人 MOCHIDA TORU;NISHIURA SHINICHI
分类号 H01L21/60;B23K20/00 主分类号 H01L21/60
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