X-RAY SENSOR AND X-RAY INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To improve the resolution of a sensor for performing an accurate inspection inexpensively. SOLUTION: In sensor structure for converting X rays to light by a phosphor 3 being formed on a substrate 1 and for taking out the converted light as an image signal by a photoelectric conversion part 2, the phosphor 3 is formed on the etched substrate 1 and the formation pattern of the phosphor 3 is generated by etching the substrate 1 itself, thus accurately forming the shape of the phosphor 3, achieving structure for reducing the diffusion of fluorescence, and providing a high-resolution sensor.