| 摘要 |
PROBLEM TO BE SOLVED: To prevent defective pattern connections by dividing a plurality of drawing data into fields. SOLUTION: Drawing data 11 is converted into a recognizable format for it to be transferred to a memory 13. A program stored in a storage medium 16 is executed in the drawing control unit 15 to divide the data into a plurality of fields using the input chip size 3. The coordinates are stored in the memory 13. The drawing data 1 and 2 are read sequentially and divided, based on the chip field coordinates. Each divided drawing data is directly drawn on a sample of a device body 14 by the S&R method. Since the data is not affected much by deflection, drawing defects such as disconnection of different patterns is prevented from occurring.
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