CYLINDER MADE OF VITRIFIED CARBON, ITS PRODUCTION, PLASMA GENERATOR, ITS CHAMBER INNER WALL PROTECTING MEMBER, PROTECTION OF THE CHAMBER INNER WALL AND PLASMA TREATMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a large-sized cylinder made of vitrified carbon, to obtain the cylinder made of vitrified carbon having a dense structure and a chamber inner wall protecting member for a plasma generator capable of preventing reduction in yield caused by metal contamination of semiconductor wafer wafer and a discharged foreign matter and readily removing a deposit film of the plasma generator and to provide a method for protecting the chamber inner wall for the plasma generator, the plasma generator and a method for plasma treatment. SOLUTION: This method for producing a cylinder made of vitrified carbon comprises molding a thermosetting resin into a laminar shape, curving the sheet into a cylindrical shape, bonding the end parts, and subjecting the cylinder to carbonizing and baking. The cylinder made of vitrified carbon has <=100 μm maximum pore diameter. The chamber inner wall protecting material for a plasma generator is composed of the cylinder 2 made of vitrified carbon. The method for protecting the chamber inner wall for the plasma generator comprises attaching the chamber inner wall protecting member for the plasma generator to the chamber 1 inner wall for the plasma generator. The plasma generator is provided with the chamber inner wall protecting member. The method for plasma treatment uses the plasma generator.