| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a laser processing device, which can be miniaturized and is suitable for precision processing with high accuracy. SOLUTION: A processing table 11, on which a workpiece is put, is composed of a rigid body, and driven by a precision Z stage 13 movable in the optical axial direction of the laser light and a rough moving X-Y stage 14 movable in a vertical direction against the optical axial direction. A measuring system for a distance measurement and a coordinate measurement is arranged on the table 11, and a reference plane for positioning is set at a reference table 12 which is equipped with a laser optical system and composed of the rigid element. Thus, only the relative position relation of a processing point and the laser optical system is measured so as to carry out the positioning control of the table 11.</p> |
