| 摘要 |
PROBLEM TO BE SOLVED: To accurately maintain the level of processing liquid by providing the means which is connected to a circulating means so that the volume of the liquid is adjusted and the level of the liquid in a small capacity processing channel is maintained at a constant level. SOLUTION: Assemblies 12, 13 and 15, slot nozzles 17a, 17b and 17c and a back plate 9 are designed to minimize the amount of the processing liquid contained in processing channels 25, a container 11, a circulating system and gaps 49a, 49b, 49c and 49d. A channel 100, which is directed upward, forms the entrance of the channels 25. A channel 101, which is directed upward, forms the exit of the channels 25. The nozzles 17a, 17b and 17c are linked to the circulating system through passes 50a, 50b and 50c, respectively. A sensor 52 is connected to the container 11 and used to maintain a level 235 of the processing solution with a path 51. Excess processing liquid is removed from the overflow path 51. |
