| 摘要 |
<p>PROBLEM TO BE SOLVED: To efficiently and certainly remove the elastomer residue of a vulcanizing mold within a short time by ashing while reducing the use amt. of gas and the amt. of exhaust gas. SOLUTION: In a vulcanizing mold cleaning apparatus 1 equipped with a vacuum treatment tank 2, the electrode 7 arranged in the vacuum treatment tank 2, the high frequency power supply 10 connected to the electrode and the vulcanizing mold 9 arranged in the vacuum treatment chamber and the gas introducing pipe 3 connected to the vacuum treatment chamber to introduce reactive gas into this tank and constituted so that voltage is applied across the electrode and the vulcanizing mold from a high frequency power supply to generate a plasma in the reactive gas introduced into the vacuum treatment tank to allow this plasma to act on the vulcanizing mold to remove the elastomer residue on the surface of the mold by ashing, a microwave cavity resonator 12 forming plasma is arranged in the gas introducing pipe 3 to excite the reactive gas and this excited reactive gas is introduced into the vacuum treatment tank.</p> |
