发明名称 System and method for laser ultrasonic bond integrity evaluation
摘要 A nondestructive bond testing system is implemented using a pulse laser that sends a single or multiple pulse(s) of controlled magnitude and bombards an object of interest causing a thermoelastic excitation response. This excitation in turn induces an ultrasonic propagation along or through the surface material. By detecting, capturing and interpreting these thermoelastic propagation signatures, the attachment condition of the joining materials is determined. The technique is a significant improvement over traditional mechanical pull, shear or contact type techniques. The techniques are implemented in automated high speed inspection systems suitable for real time manufacturing application. Particular applications include evaluating material joining in microelectronics manufacture (such as ball bonds) and thin coating processes.
申请公布号 AU2758599(A) 申请公布日期 1999.07.12
申请号 AU19990027585 申请日期 1998.12.18
申请人 BERNARD SIU 发明人 BERNARD SIU
分类号 G01B11/00;G01B17/00;G01H9/00;G01N29/00;G01N29/04;G01N29/22;G01N29/24;G01N29/34;G01N29/38;G01N29/46;G01N29/48;G10K15/04 主分类号 G01B11/00
代理机构 代理人
主权项
地址