METHOD OF RESTORING SURFACE LAYERS OF PARTS OF TITANIUM-BASED ALLOYS BY THE AID OF CYCLE OF IONIC-BEAM TREATMENTS

摘要

FIELD: metalworking. SUBSTANCE: method consists in ionic implantation of nitrogen with energy 30 keV at current density 43-50 mvA/sq.cm and fluence <EMI ID=0.31 HE=6 WI=12 TI=CHI> ion/sq.cm followed by postimplantation annealing at 540 C for 2 hr. According to invention, preliminarily, ionic implantation of argon ions with energy 15 keV is performed at current density 60 mcA/sq.cm for 1200-1800 sec, after which, without removal of part under treatment from operation chamber, ion-plasma purification by argon plasma ions with energy 300 eV is performed at current density 5-10 mA/sq.cm for 5000-6000 sec. EFFECT: improved working characteristics of parts.