| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film material which can have stable and superior soft magnetic characteristics and can be formed on an organic polymer substrate. SOLUTION: An amorphous metallic thin-film contains at least three types of elements Co, Fe and C. The thin film contains a number of C elements, corresponding to not less than 4 atomic % and not larger than 45 atomic % and has a saturated magetostrictive constantλ(where 0<λ<=20×10<-6> or less) and is formed on an organic polymer substrate. In a mixture gas of inert gas and hyrocarbon gas, the hydrocarbon gas has a volume fraction of not less than 0.05 and not larger than 0.4. A thin film is formed on the substrate through vaporizing at least Co and Fe.
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