| 摘要 |
PROBLEM TO BE SOLVED: To block contaminant metals from reaching a substrate being treated by cationizing the metals before reaching the substrate and reacting the cationized metals with a rare gas to discharge them as bond products. SOLUTION: A soaking tube 103 is made of a material for suppressing cationizing heavy metals, e.g. SiC or SiN and its inner surface is covered with a material for accelerating ionizing the heavy metals, e.g. SiO2 . Gas flows 108a-108c are fed in an inner quartz tube 101, between the inner and outer quartz tubes 101, 102, and between the outer quartz tube 102 and soaking tube 103. The contaminant heavy metal esp. includes Fe or Cu easy to form bond products with a rare gas e.g. Kr or Xe when they are cationized. The contaminant metals can be discharged as a bond product with the rare gas, thereby avoiding contaminating the board with the contaminant metals. |
