| 摘要 |
PROBLEM TO BE SOLVED: To provide a safe projection aligner that prevents deterioration of optical elements at a low cost during maintenance of the laser optical path. SOLUTION: This projection aligner exposes a wafer using laser light 21 supplied from the laser source. The projection aligner comprises a light shielding body 102 that covers the peripheral area of the laser optical path injected from the light source and is supplied with an inert gas inside, a case that can be mounted and dismounted as required and covers the outside of the light shielding body 102, an opening to insert a detector 201 that is provided on the opening to detect physical or chemical characteristics near the optical path, a light blocking lid 22 that is provided at the insert opening and can opens or closes depending on whether the detector 201 is mounted or dismounted. When the detector 201 is mounted, the lid opens pushed by the detector 201. The lid closes and becomes stable when the detector 201 is dismounted. The projection aligner also has a sealing lid that can open or close when detectors provided on the insert openings 104 to 107 are mounted or dismounted. The sealing lid opens when the detector 201 is mounted so that the case cannot be mounted. |
