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发明名称
SUBSTRATE PROCESSOR
摘要
申请公布号
JPH11186141(A)
申请公布日期
1999.07.09
申请号
JP19970355149
申请日期
1997.12.24
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
YABE MANABU
分类号
B05C11/08;H01L21/027;H01L21/304;(IPC1-7):H01L21/027
主分类号
B05C11/08
代理机构
代理人
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