| 摘要 |
PROBLEM TO BE SOLVED: To provide a microoscillator in which the resonance frequency of oscillation can be fine adjusted freely without being restricted by design of an apparatus. SOLUTION: A weight oscillatory section 1 is supported by beams 8 from the opposite sides and driven to oscillate relatively to a substrate 10 by applying an AC exciting voltage to a drive electrode 2. The weight oscillatory section 1 is provided with moving side electrodes 6A, 6B and fixed electrodes 5A, 5B are disposed oppositely thereto and applied with an AC bias voltage. An AC phase regulating means 24 regulates the phase of the AC bias voltage in order to regulate the resonance frequency of excitation of a microoscillator. Consequently, electrostatic attraction between the moving side electrodes 6A, 6B and the fixed electrodes 5A, 5B is regulated freely and the resonance frequency of the microoscillator is adjusted. |
