| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveying robot, which is able to suppress the vibration of a substrate during conveyance. SOLUTION: A turning base part 2, which is arranged on a base 1 so as to be turnable tow robot arms 3A and 3B which comprise first arms 32A and 32B, second arms 33A and 33B and third arms 34A and 34B provided on the turning base part 2, can be extended and shortened in the horizontal direction and are arranged symmetric with respect to the right and left, and chucks 4A and 4B which are fixed to the third arms 34A and 34B are provided. One robot arm 3B is arranged so that the lower surface of the second arm 33B becomes higher than the upper surface of a substrate WA, which is held on the third arm 34A of the other robot arm 3A via a chuck. Consequently, the rigidity of the moving part can be enhanced, and the vibrations of the substrates WA and WB during conveyance can be prevented. |
