APPARATUS FOR TREATMENT SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To easily set and execute a sheet freed treatment by detecting exis tence of a substrate in each of slots of a substrate cassette, and executing only the treatment of each of substrates housed in the cassette according to sheet-feed treating recipes. SOLUTION: A substrate detector sensor detects the existence of as substrate in each of slots of a substrate cassette. Sheet feed treatment recipes contrg. information representing the carrying order of treating units and information representing the treating condition of the treating units are set in an external magnetic memory 234 for each of the hosed and detected substrates, so that only those substrates detected being housed in the cassette are treated in accordance with the sheet feed treatment recipes. Even if housed in only a part of the slots of the cassette, the treatment recipes can be set quickly for executing the sheet feed treatment.