RADIATION SENSITIVE COMPOSITION

摘要

PROBLEM TO BE SOLVED: To ensure high photosensitivity and high resolution and to obtain a good pattern shape by incorporating a resin having acid decomposable protective groups and a compd. having acyloxyalkoxy groups. SOLUTION: The radiation sensitive compsn. contains an alkali-soluble resin or a resin having acid decomposable protective groups on at least part of the alkali solubility imparting groups of the resin and a compd. having two or more acyloxyalkoxy groups in one molecule. When the compsn. is applied to a substrate and heated, the alkali-soluble parts of the resin (base resin) which occupies the majority of the compsn. and the acyloxyalkoxy groups (heat crosslinker) cause an exchange reaction. The base resin is crosslinked, the mol.wt. of the resin is increased and the resin is made slightly soluble in an alkali developer.