| 摘要 |
PROBLEM TO BE SOLVED: To readily perform control of the direct advance movent and the rotating movement of a sample carrier arm. SOLUTION: This sample carrier device is constituted of a carrier-arm rotating through shaft 16 and a direct carrier-arm advancing through shaft 17, which are rotatably driven in a vacuum chamber 2, an arm direct advancing motor M2, which rotates and drives the shaft 17, a first arm supporting member 29 which is rotatably supported around the shaft 17 and rotatably supports a first arm 38 at the outer end part, a second arm 43 which is supported by a second arm supporting shaft 41 of the first arm 38, and wherein a conveying-arm supporting shaft 46 is provided, a conveying arm 51 which is rotatably supported around the shaft 46, and an arm rotating motor M1 which rotates and drives the shaft 17 and the shaft 16. When only the arm direct advancing motor M2 is rotated without having the arm rotating motor M1 ratate, the conveying arm 51 is advanced directly and moved. When only the arm rotating motor M1 is rotated without rotating the arm direct advancing motor M2, the direction of the conveying arm 51 is changed. |
