DATA GENERATION METHOD FOR DIRECTLY DRAWING ELECTRONIC LINE, DIRECT PLOTTING METHOD AND DIRECT DRAWING DEVICE

摘要

PROBLEM TO BE SOLVED: To suppress the deterioration of the drawing precision of patterns owing to the precision lack of a polarization position during beam polarization in the direct plotting of charged particles. SOLUTION: Design patterns 3 consisting of the rectangular patterns of graphic types A and the rectangular patterns of graphic types B are arranged in pattern data 1. In converting data, pattern data 1 is divided at every SSF (polarization possible range) 4. The respective design patterns 3 are divided into the rectangular patterns A and B. Address information is given to the rectangular patterns so that plotting is executed in the order of A→B→A→B. The design patterns 3 are sorted by the address information in a form that they are arranged in order from the edge of SSF4.