发明名称 CHARGED PARTICLE BEAM DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a device that quickly controls the temperature of the cassette to be processed. SOLUTION: A bar 111 is pressed and held by a pushing body. When the bar 111 is pushed toward a cassette, arms 104 and 105 open widely using axes 109 and 110 as fulcrums (at least to allow the cassette to be inserted). Arms of the cassette insert/eject mechanism are used to place the cassette on the upper stage 102 of the magazine 100. When pressure to the bar 111 by the pushing body is released, the bar 111 is pulled toward the inside wall of the magazine by elastic bodies 114 and 115. The arms 104 and 105 close using the axes 109 and 110 as fulcrums and hold the set cassette 101 securely. A thermometer 118 provided on the end of an arm contacts the cassette 101 and measures the temperature of the cassette.</p>
申请公布号 JPH11186126(A) 申请公布日期 1999.07.09
申请号 JP19970347588 申请日期 1997.12.17
申请人 JEOL LTD 发明人 KAWATO NOBUAKI
分类号 G03F7/20;H01J37/20;H01J37/305;H01L21/027;H01L21/673;H01L21/68;H01T23/00;(IPC1-7):H01L21/027 主分类号 G03F7/20
代理机构 代理人
主权项
地址