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发明名称
FORMING METHOD OF CONDUCTIVE THIN FILM, ITS EQUIPMENT AND MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH11186196(A)
申请公布日期
1999.07.09
申请号
JP19970354933
申请日期
1997.12.24
申请人
SONY CORP
发明人
YAMANE CHIGUSA
分类号
C23C16/56;H01L21/28;H01L21/285;H01L21/768;(IPC1-7):H01L21/285
主分类号
C23C16/56
代理机构
代理人
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地址
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