| 摘要 |
<p>A system for opening and closing the port door (116) from the inside of an I/O mini-environment in a wafer processing system that can also store the door within the mini-environment. The system utilizes various gripping attachment (128) means which can be installed on the back of a robotic end effector (125). The end effector (125) can have various gripping means such as magnetic, vacuum, or electroactuating which cause the door to disengage from its sealing position.</p> |
