申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
SHIMIZU, TAKAAKI, NAKA KUBIKI-GUN, NIIGATA-KEN, JP;KINSHO, TAKESHI, NAKA KUBIKI-GUN, NIIGATA-KEN, JP;OGIHARA, TSUTOMU, NAKA KUBIKI-GUN, NIIGATA-KEN, JP;KANEKO, TATSUSHI, NAKA KUBIKI-GUN, NIIGATA-KEN, JP;SAITO, RYUICHI, NAKA KUBIKI-GUN, NIIGATA-KEN, JP;KURIHARA, HIDESHI, A-12F, R&D BUILDING, TAKATSU-KU, KAWASAKI-SHI, KANAGAWA-KEN, JP |