发明名称 DIGITAL SWITCHING CIRCUIT IN MOS TECHNOLOGY
摘要 PROBLEM TO BE SOLVED: To generate only a slight coupling and noise processes by forming one strip of a strip conductor from a metal strip conductor on a dielectric layer, and by forming the other strips as the doping tab regions in the lower regions of the metal strip conductor. SOLUTION: A microwave strip conductor 2, consisting of a metal strip conductor 3 and a doping tab area 4, is provided on a semiconductor substrate 1. The doping tab region 4 is provided in the lower area of the metal strip conductor 3 of the semiconductor substrate 1 and may be formed through diffusion. A dielectric layer 5 of silicon dioxide, for example, is provided between the metal strip conductor 3 and the doping tab region 4. In this way, the conductor 2 comprising the metal strip conductor 3 and the doping tab region 4 transfers the signal energy to the region of the dielectric layer 5 between the metal strip conductor 3 and doping tab region 4.
申请公布号 JPH11186507(A) 申请公布日期 1999.07.09
申请号 JP19980209257 申请日期 1998.07.24
申请人 发明人
分类号 H01L21/3205;H01L21/822;H01L23/52;H01L23/66;H01L27/04;H01P1/15;H03K17/16;(IPC1-7):H01L27/04;H01L21/320 主分类号 H01L21/3205
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