| 摘要 |
<p>A deformable mirror device including a substrate (11), a pair of posts (13) protruding from the upper surface of the substrate (11) to be spaced a predetermined distance from each other, an electrode (15) formed on the upper surface of the substrate (11), a reflection mirror (17) arranged to face the electrode (15) by being supported by the posts (13), and first and second support pieces (19a, 19b) having predetermined rigidities for supporting the reflection mirror (17). The support pieces (19a, 19b) are connected between the reflection mirror (17) and the posts (13) so that inclination of the reflection mirror (17) can be adjusted by an electrostatic attraction between the electrode (15) and the reflection mirror (17). The electrode (15) is arranged to be offset from the reflection mirror (17) such that magnitude of the forces applied to the electrode (15) at the positions between each of the first and second support pieces (19a, 19b) and the reflection mirror (17) differ from each other. Therefore, in the deformable mirror device, the path of light can be easily changed with a low driving voltage. <IMAGE></p> |
