发明名称 GROOVE ROLLER FOR WIRE SAW
摘要 PROBLEM TO BE SOLVED: To simplify operation, so that dynamic balance of a groove roller can be adjusted, and attain the improvement of flatness of a wafer and reduction of a rate of occurrence of a wire break in cutting ingot. SOLUTION: In the case of adjusting dynamic balance of each groove roller 12, along an annular guide groove 51, a pair of balance weights 50, on an outer surface of an end plate part 40a of each sleeve end plate 40, are turned clockwise or counterclockwise, to be balanced, so that by simple operation, dynamic balance of the groove roller 12 can be adjusted. In this way, the improvement of flatness of a wafer and reduction of a rate of occurrence of a wire break in cutting ingot are attained.
申请公布号 JPH11179645(A) 申请公布日期 1999.07.06
申请号 JP19970363635 申请日期 1997.12.15
申请人 MITSUBISHI MATERIALS SILICON CORP 发明人 KOBAYASHI TATSUNOBU;KITAMURA YOSHIKI;SUGITANI KAZUAKI;KIYAMA TAKUMI
分类号 B24B27/06;B23D57/00;(IPC1-7):B24B27/06 主分类号 B24B27/06
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