SUBSTRATE TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a substrate treatment apparatus capable of immediately executing pure water cleaning right after the stop of a medicinal liquid treatment and decreasing the volume of waste medicinal liquids. SOLUTION: This apparatus includes a first vessel 4 for executing the first treatment of a substrate 1 and a second vessel 5 for executing the second treatment of the substrate 1 and is provided with an aperture 13 and a substrate vertical driving means 10 to allow the substrate 1 to move between these vessels 4 and 5. The first vessel 4 is provided with a first discharge port 8 and the second vessel 5 with a second discharge port 9 in order to separately recover the waste liquids generated in the first and second treatments.