| 摘要 |
PROBLEM TO BE SOLVED: To efficiently form metal-contg. thin film by applying the electric field on the space with counter electrode under nearly atmospheric pressure in a gas atmosphere contg. a metallic compd. so as to regulate the discharge current density to a specified range and generating plasma. SOLUTION: Under nearly atmospheric pressure in a gas atmosphere contg. a metallic compd., the discharge current density between the electrodesis regulated to the range of 0.2 to 300 mA/cm<2> , by which the metallic compd. is plasma- excited, and the plasma is retained to a glow discharge state to enable the formation of metallic element-contg. thin film. For realizing this formation, it is preferable that the pulsificated electric field is applied on the space between the electrodes. It is preferable that the raising of the pulse voltage to be applied on the space between the electrodes is regulated to <=100μs, the intensity of the pulse electric field is regulated to 1 to 100 kV/cm, the frequency of the electric field is regulated to 0.5 to 100 kHz, and the pulse continuation time is regulated to 1 to 1,000μs. Moreover, as the metallic compd., metallic alkoxide is most preferable used.
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