发明名称 |
Method of making a piezoelectric element |
摘要 |
A piezoelectric resonator is provided which is formed of an element piece. This element piece further includes a piezoelectric material and an electrode formed on the surface of the piezoelectric material. A plug for mounting the element piece and a case for housing said element piece in an air-tight manner are also provided. The surface of the element piece is coated with a resin film formed from an excited active species of an organic compound generated through a gas discharge in a predetermined discharge gas at approximately atmospheric pressure. A method of manufacturing a piezoelectric resonator is also provided, which comprises the steps of first mounting the element piece on the plug. Next, a gas discharge in a predetermined discharge gas is produced at approximately atmospheric pressure and an excited active species of an organic compound which is a liquid or a gas at room temperature is generated as a result of this gas discharge in a gas discharge region. Next, the surface of the element piece is exposed to the excited active species and a resin film covering the surface of the element piece is formed.
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申请公布号 |
US5918354(A) |
申请公布日期 |
1999.07.06 |
申请号 |
US19970825804 |
申请日期 |
1997.04.02 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
IKEGAMI, YASUMITSU;MIYAKAWA, TAKUYA |
分类号 |
H03H3/02;H03H9/10;(IPC1-7):H01L41/22 |
主分类号 |
H03H3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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