| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate cassette that can be used in cleaning as well as transportation, requires no transfer, causes no liquid residues after cleaning, no defective drying, no water marks, and no substrate chips, cracks or the like during transportation, and prevents cutting chips or the like of its substrate support faces. SOLUTION: On both sides of a frame, support members 3 are arranged each formed with a plurality of support protrusions 3a spaced longitudinally at predetermined intervals. The support protrusions 3a of the support members 3 each has a first or horizontal support face 3b for supporting the lower face 10b of a substrate 10 during substrate transportation and a second or tapered support face 3d for supporting the edge corner 10a of the substrate 10 during substrate cleaning. For substrate transportation, the first support faces 3b are oriented horizontally upward, while for substrate cleaning, the second support faces 3d are held substantially vertical. |
