摘要 |
PROBLEM TO BE SOLVED: To maintain the accuracy of workpiece polishing, improve work efficiency, without accumulating cutting powder of a workpiece in a pellet pheriphery, even by continuing work particularly over a long time, relating to a polishing device using a pellet consisting of fixed abrasive grains. SOLUTION: This device comprises vertically opposed pellet surface plates A, A and a carrier having a workpiece insertion hole arranged between the pellet surface plates A, A to be arranged between a sun gear and an internal gear while rotating around a periphery of the sun gear by its rotation to be moved. In the pellet surface plate A, on a disk-shaped pellet substrate 5 having a through hole 5a in the center, many pellets 6, 6,... are fixedly arranged in a suitable position. The pellets 6, 6,... in a side of the outermost/innermost peripheral edges 5b, 5c of the pellet substrate 5 are formed by a little exposing each pellet 6 from the side of the outermost/innermost peripheral edges 5b, 5c of the pellet surface plate A. |