| 摘要 |
<p>PROBLEM TO BE SOLVED: To efficiently remove small pieces like dust and dirt on a machining surface by having optical flux of a prescribed finite width on a pattern surface in the arranging direction of the periodical structure of the pattern, converging light on the pattern surface in the direction orthogonally crossing the arranging direction, and having a refracting power only in such orthogonally crossing direction. SOLUTION: An optical flux emitted from a YAG laser 1 is reflected by a mirror 2, dichotic mirror 4 and a mirror 5, and is made incident on a cylindrical lens 6. In this case, the optical flux passed through the cylindrical lens 6, 7 in the XY cross section is emitted onto a metallic mask 8 with a prescribed lighting width, and then incident on the workplace 10 with a prescribed width through a positive lens 9. In the meantime, in the XZ cross section, the optical flux reflected by the mirror 5 and passed through the cylindrical lens 6, 7 is converged on the metallic mask 8. In addition, the optical flux from the metallic mask 8 is coverged by the positive lens 9, forming a mask pattern image on the workpiece 10; thus, an orifice plate is manufactured, with dust like carbon debris burnt or optically removed.</p> |
