发明名称 Thin film actuated mirror array in an optical projection system and method for manufacturing the same
摘要 Thin film AMA in an optical projection system and a method for manufacturing the same are disclosed. The thin film AMA has an active matrix having electrical wiring and a connecting terminal, a first actuator, a second actuator, a supporting element, and a reflecting member. The first actuator and the second actuator are parallely formed and the supporting element is formed in the direction perpendicular to the first actuator and the second actuator. The reflecting member supported by a plurality of posts is tilted by a double displacement, so the quality of a picture projected onto a screen is greatly increased. Also, the first actuator and the second actuator respectively have symmetrical structures centering around the first anchor and the second anchor so that the first actuator and the second actuator have stable structures.
申请公布号 US5920421(A) 申请公布日期 1999.07.06
申请号 US19970988450 申请日期 1997.12.10
申请人 DAEWOO ELECTRONICS CO., LTD. 发明人 CHOI, YOON-JOON
分类号 G02B26/08;(IPC1-7):G02B26/08;G02B7/182;H01L41/053 主分类号 G02B26/08
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