Stage device and exposure apparatus,申请号AU19990016828-传众专利搜索

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发明名称	Stage device and exposure apparatus
摘要
申请公布号	AU1682899(A)	申请公布日期	1999.07.05
申请号	AU19990016828	申请日期	1998.12.17
申请人	NIKON CORPORATION	发明人	TETSUO TANIGUCHI;SABURO KAMIYA
分类号	G01B11/00;G01B11/02;G03F7/20;G03F9/00	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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