| 摘要 |
<p>PURPOSE:To prevent generation of exfoliation and crack in the case of rise and drop of temperature during repeated heat treatment in a semiconductor process. CONSTITUTION:The title ceramics heater is characterized by that a buffer layer composed of thermally decomposed boron nitride is formed on a substrate composed of graphite, an electrode for an electrostatic chuck and a heat generating layer which are composed of thermally decomposed graphite are formed on the buffer layer, and an insulating layer composed of thermally decomposed boron nitride is formed on the heat generating layer.</p> |
