PROCEDE POUR LE TRANSFERT D'UN FILM MINCE COMPORTANT UNE ETAPE DE CREATION D'INCLUSIONS

摘要

The invention concerns a method for transferring at least a thin film of solid material delimited in an initial substrate (20) comprising the following steps: a step for forming a layer of inclusions (21) in the initial substrate (20), at a depth corresponding to the thickness required for the thin film, said inclusions being provided to constitute traps for the gas species to be subsequently implanted; a subsequent step for implanting said gas species so as to bring the gas species into the layer of inclusions (21), the dose of implanted gas species implanted being sufficient to bring about the formation of microcavities capable of constituting a fracture plane enabling the thin film to be separated from the rest of the substrate.