发明名称 MANUFACTURE OF GALLIUM NITRIDE BASE COMPOUND SEMICONDUCTOR LASER
摘要 PROBLEM TO BE SOLVED: To improve flatness of edges of a cavity, by correctly making the edges surface a or m of gallium nitride compound semiconductor. SOLUTION: A semiconductor laser is composed of gallium nitride base compound semiconductor layers on a sapphire substrate. When cavity edges are formed, the edges are oriented in directions L1 and L2 which are inclined by a specified offset angle θ from a main axis F (c axis) of sapphire crystal which indicates the direction of the edges. In this way, the edges become correctly surface a or surface m of the gallium nitride base compound semiconductor crystal.
申请公布号 JPH11177179(A) 申请公布日期 1999.07.02
申请号 JP19970364050 申请日期 1997.12.16
申请人 TOYODA GOSEI CO LTD 发明人 TEZENI YUUTA;KOIKE MASAYOSHI;YAMAZAKI SHIRO
分类号 H01L33/06;H01L33/32;H01S5/00;H01S5/323;H01S5/343 主分类号 H01L33/06
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