发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor integrated circuit device with which high performance and high reliability of a wiring layer or the like can be realized by using a simple manufacturing process, and a manufacturing method of the semiconductor integrated circuit device. SOLUTION: In this circuit device, dummy wiring layers 15b-15e identical to an intermediate wiring layer 15a are arranged on the periphery of the intermediate wiring layer 15a of a penetrating through-hole 13. For example, the intermediate wiring layer 15a and the dummy wiring layers 15b-15e are arranged on an intersection 16a regions of wiring pitch lines 16 of the wiring layers 15f-15i of the same layers.
申请公布号 JPH11176831(A) 申请公布日期 1999.07.02
申请号 JP19970336963 申请日期 1997.12.08
申请人 HITACHI LTD 发明人 NAMEKI BUNGO
分类号 H01L21/3205;H01L21/768;H01L23/52;H01L23/522;(IPC1-7):H01L21/320 主分类号 H01L21/3205
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