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发明名称
SUBSTRATE FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH11176982(A)
申请公布日期
1999.07.02
申请号
JP19970344760
申请日期
1997.12.15
申请人
APIC YAMADA CORP
发明人
MORIMURA MASAHIRO
分类号
H01L23/28;H01L23/12;(IPC1-7):H01L23/12
主分类号
H01L23/28
代理机构
代理人
主权项
地址
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