WAFER HEATING FILAMENT LAMP AND HEATING LIGHT SOURCE,申请号JP19970362326-传众专利搜索

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发明名称	WAFER HEATING FILAMENT LAMP AND HEATING LIGHT SOURCE
摘要
申请公布号	JPH11176389(A)	申请公布日期	1999.07.02
申请号	JP19970362326	申请日期	1997.12.12
申请人	USHIO INC	发明人	SUZUKI SHINJI
分类号	H01K1/24;H01L21/00;H01L21/205;H01L21/22;H01L21/26;H05B3/00;(IPC1-7):H01K1/24	主分类号	H01K1/24
代理机构		代理人
主权项
地址

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