| 摘要 |
PROBLEM TO BE SOLVED: To reduce offset signals in a small-sized angular velocity sensor in which a driving element part, a detection element part and a feedback element part are arranged on the same surface of a vibrator. SOLUTION: In this angular velocity sensor of a semiconductor type, the vibrator 2 is formed by etching a semiconductor substrate and the driving element parts 8 and 8', the detection element parts 9 and 9' and the feedback element parts 10 and 10' are formed on the surface of the vibrator 2. So as to equalize the capacitance of the feedback element parts 10 and 10' and the detection element parts 9 and 9', the areas of both are equalized. |
