PRODUCTION OF FERROMAGNETIC TUNNEL JUNCTION ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a process for producing a ferromagnetic tunnel junction element capable of adequately maintaining a good insulation state between first and second ferromagnetic layers by a tunnel barrier layer. SOLUTION: The process for producing the ferromagnetic tunnel junction element formed by holding the tunnel barrier layer 35 between the first ferromagnetic layer 33 and the second ferromagnetic layer 6 has a stage for simultaneously polishing the end faces of the first ferromagnetic layer 33, the tunnel barrier layer 35 and the second ferromagnetic layer 36. This polishing stage successively includes a first polishing treatment to mechanically polish the end faces described above and a second polishing treatment to dry etch the end faces.