| 摘要 |
<p>PROBLEM TO BE SOLVED: To carry out flaw rate measuring and flaw rate regulation with an integrated equipment and to enable it to be arranged and set by connecting the input and output openings of a flaw rate detector with flaw rate control valves to the input and output passages of each of a plurality of manifold blocks. SOLUTION: This flaw rate detector assembly in a form of manifold is constituted of a plurality of flaw rate detectors 1 with flaw rate control valves and a plurality of manifold blocks 2 connected to and mounting the flaw rate detectors 1. In the flaw rate detector 1, the detecting part of a flaw rate sensor 12 is arranged in a fluid channel passing through the inside, and a flaw rate control valve 15 is arranged in the fluid channel. The flaw rate detector 1 comprises an input block 10b and an output block 10c. A plurality of the manifold blocks 2 and 2A are connected and fixed by combining bolts 45 inserted through end plates 44 and are used. Input ports 41 are connected to a common fluid source, and output ports 42 detect flaw rates by the flaw rate detector 1 installed on each manifold block 2 and output a fluid of which flaw rate is regulated.</p> |
