发明名称 THIN-PLATE WORKPIECE CONVEYING HAND
摘要 PROBLEM TO BE SOLVED: To resolve a weak twisting deformation, reduce a bending deformation and an own weight bending at the time of mounting a thin-plate workpiece, and improve reception efficiency, by a method wherein a thin-plate workpiece conveying hand is formed of a fiber reinforcing plastic member and a metal. SOLUTION: In a conveying hand, a hand detect part 5 and a hand base part 7 are formed of a fiber reinforcing plastic part composed of a carbon fiber and a thermosetting resin. Further, a curve part 7 for joining the hand detent part 5 to the hand base part 6 is formed of a metal composed of an aluminum alloy, a titanium alloy and the like. A twisting stiffness which is a weak point for a thermosetting member composed of a carbon fiber and a thermosetting resin is reinforced. Accordingly, even in the conveying hand of any forms, it is possible to reduce an own weight and a deformation amount of bending when mounting a thin-plate workpiece. As the result, it is possible to remarkably decrease a thin-plate workpiece mounting pitch of a cassette.
申请公布号 JPH11176904(A) 申请公布日期 1999.07.02
申请号 JP19970342568 申请日期 1997.12.12
申请人 TORAY IND INC 发明人 NAGAYAMA KAZUKI;KATO TORU;NISHI YASUHIRO
分类号 B65D19/32;B25J9/06;B25J15/00;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B65D19/32
代理机构 代理人
主权项
地址