| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer transfer device which is capable of developing efficiency of wafer transfer operation by a method, wherein the device is able to detect three-dimensional positions of a simple and low cost wafer transfer device and a wafer container which is also capable of performing the three dimensional positional detection and wafer-holding in a series of operations. SOLUTION: A wafer transfer device, provided with a wafer supporting fork 11 transferable in three-dimensional directions as well as for carrying in and out a wafer 13 into a wafer container such as a carrier or a boat is constituted such that a reflection type level detection sensor 14 and a reflection type horizontal position detecting sensor 15 is arranged integrally with the fork 11 for detecting the three-dimensional position of the wafer 13, by shifting the fork 11 both vertically and laterally for transfering the wafer 3 with the fork 11 according to the results of the detection. |
