MANUFACTURE OF NITRIDE SEMICONDUCTOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method by which a nitride semiconductor element having highly smooth split faces can be manufactured at a high yield. SOLUTION: In a method for manufacturing nitride semiconductor element nitride semiconductor elements are manufactured by splitting a semiconductor wafer 100 which is composed of a substrate 101 and nitride semiconductors 102 formed on the substrate 102 and has first and second main surfaces into pieces. The process particularly includes a step of forming groove section 103 into the substrate 101 from the first and/or second main surface side, a step of forming break lines 104 in the groove sections 103 with a laser beam, and a process of splitting the semiconductor wafer 100 into pieces along the break lines 104.