SEMICONDUCTOR SUBSTRATE AND ITS MANUFACTURE,申请号JP19970362497-传众专利搜索

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发明名称	SEMICONDUCTOR SUBSTRATE AND ITS MANUFACTURE
摘要
申请公布号	JPH11176711(A)	申请公布日期	1999.07.02
申请号	JP19970362497	申请日期	1997.12.15
申请人	NEC CORP	发明人	HAMASHIMA TOMOHIRO
分类号	H01L21/762;H01L21/02;H01L27/12;(IPC1-7):H01L21/02	主分类号	H01L21/762
代理机构		代理人
主权项
地址

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